PENTAKIS(DIMETHYLAMINO)TANTALUM-Shandong Huashang Chemical Co., Ltd.

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PENTAKIS(DIMETHYLAMINO)TANTALUM

2026-04-14

产品详情

Cas：19824-59-0
产品名称PENTAKIS(DIMETHYLAMINO)TANTALUM 查看相似产品 >

简介

Shandong Huashang Chemical Co., Ltd. is a high-tech enterprise specializing in the research and development, manufacturing, and sales of fine chemicals. Headquartered in Jinan, Shandong, China, we are committed to delivering high-quality products to our global partners. Currently, over 90% of our products are exported to developed markets, including North America, Europe, Japan, South Korea, and the Middle East.

Basic Information

Product Name: Pentakis(dimethylamino)tantalum; Alias: PDMAT, TADMA, Tantalum dimethylamide;

CAS Number: 19824-59-0 (MDL: MFCD01631286)

Molecular Formula: C??H??N?Ta

Molecular Weight: 401.33 g/mol

Structural Formula: Ta[N(CH?)?]? (tantalum-centered organometallic complex with five dimethylamido ligands)

Classification: Organometallic compound, tantalum precursor, CVD/PVD material, semiconductor thin film material, chemical catalyst

Physical & Chemical Properties

Pentakis(dimethylamino)tantalum is a light yellow to orange crystalline solid or chunk, with high volatility and high sensitivity to air and moisture. It is soluble in organic solvents such as toluene, hexane, and tetrahydrofuran, but hydrolyzes rapidly in water to release dimethylamine. It decomposes at 100°C (melting point, decomposes simultaneously) and is incompatible with strong oxidants, acids, and moisture. It can only remain stable under inert atmosphere (nitrogen/argon) and sealed conditions, and is a flammable solid that may release flammable gas when in contact with water.

Key physical and chemical parameters are detailed in the specification table below, meeting the requirements of high-purity semiconductor grade and industrial grades.

Main Uses

Pentakis(dimethylamino)tantalum is a critical tantalum precursor for advanced semiconductor and electronic materials, with wide applications:

Semiconductor Thin Films: As a volatile precursor, it is widely used for depositing tantalum nitride (TaN) and tantalum oxide (Ta?O?) films via CVD/ALD processes; TaN serves as a barrier layer in integrated circuits, while Ta?O? is used as a high-k gate dielectric material in integrated circuit manufacturing.
Electronic Materials: Precursor for manufacturing tantalum-based thin-film transistors (TFTs) and capacitors, effectively enhancing the performance and stability of electronic devices.
Chemical Catalysis: Acts as a catalyst for hydroaminoalkylation of olefins and other organic synthesis reactions, enabling efficient formation of C-N bonds and promoting the progress of organic synthesis reactions.
Material Science: Precursor for synthesizing tantalum-containing nanomaterials and functional coatings, providing important support for the research and development of advanced functional materials.

Packaging & Storage

Packaging Method

Lab Grade: 1g, 5g, 10g, 25g sealed glass ampoules or aluminum foil bags (filled with inert gas); 100g, 500g, 1kg HDPE plastic bottles with PTFE liners, suitable for laboratory research and small-batch testing.

Industrial Grade: 5kg, 25kg/bag (inner PE bag with desiccant, outer three-layer kraft paper bag under inert atmosphere); 50kg/200kg galvanized iron drum with PTFE liner and nitrogen-sealed; customized packaging available per customer requirements.

Storage Method

Store in a cool, dry, dark, and inert-gas-purged warehouse at a temperature of 2-8°C (refrigerated storage recommended). Keep containers tightly sealed and nitrogen-filled to prevent moisture absorption, air oxidation, and hydrolysis. Avoid contact with water, strong oxidants, and strong acids; keep away from fire, heat sources, and direct sunlight. It is a flammable solid that reacts violently with water, so strict moisture-proof measures must be taken. Shelf life is 12 months under standard sealed, low-temperature, and inert atmosphere storage conditions.

Comprehensive Specification Table

Item	Specification	Unit	Remarks
Product Name	Pentakis(dimethylamino)tantalum (PDMAT)	—
CAS Number	19824-59-0	—	MDL: MFCD01631286; PubChem: 24873088
Molecular Formula	C??H??N?Ta	—	Organometallic complex with tantalum center
Molecular Weight	401.33	g/mol	Theoretical calculation value
Appearance	Light yellow to orange crystalline solid/chunk	—	High volatility; sensitive to air and moisture; flammable solid
Purity	≥99.99 (Semiconductor Grade); ≥98.0 (Industrial Grade)	%	Semiconductor grade for TaN/Ta?O? film deposition
Melting Point	100 (dec.)	℃	Decomposes at melting point; heat-sensitive (lit. value)
Boiling Point	100 (0.1 mmHg)	℃	High volatility under reduced pressure; 6.1℃ at 760 mmHg
Solubility	Soluble in toluene, hexane, THF; hydrolyzes in water	—	Insoluble in water; stable in dry organic solvents; reacts rapidly with moisture
Vapor Pressure	1520 (25°C)	mmHg	High volatility, suitable for CVD/ALD processes
Main Impurities	≤0.01 (Semiconductor Grade); ≤1.0 (Industrial Grade)	%	Including moisture, dimethylamine, and other metal impurities
Main Uses	CVD/ALD precursor for TaN/Ta?O? films, semiconductor material, chemical catalyst	—	Key material for integrated circuit and electronic device manufacturing
Packaging Method	1g-1kg ampoules/bottles (inert gas-filled); 5kg-200kg iron drum/kraft bag	—	Sealed, nitrogen-filled, moisture-proof packaging; anti-flammable
Storage Method	2-8℃, cool, dry, dark, nitrogen-sealed; away from moisture/oxidants	—	Shelf life 12 months under inert atmosphere; avoid contact with water

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联系我们

Shandong Huashang Chemical Co., Ltd.

联系人 Maisey Wang
联系手机+8619031118161
联系电话+8619031-118161-+8616768688388
所在地址No. 57 Industrial South Road,Shandong Province,china

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